Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338530 | Shaped showerhead for edge plasma modulation | Saketh Pemmasani, Xiaopu Li, Akshay Dhanakshirur, Mayur Govind Kulkarni, Madhu Santosh Kumar Mutyala +2 more | 2025-06-24 |
| 12297946 | Modular multi-directional gas mixing block | Kiran Garikipati, Kurt R. Langeland, Syed A. Alam | 2025-05-13 |