Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394595 | Multi-antenna unit for large area inductively coupled plasma processing apparatus | ShouQian Shao, Tae Kyung Won, Jianhua Zhou | 2025-08-19 |
| 12362149 | Film stress control for plasma enhanced chemical vapor deposition | Tae Kyung Won, Carl A. Sorensen, Sanjay Yadav, Young Dong LEE, Shinichi Kurita +1 more | 2025-07-15 |