Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362149 | Film stress control for plasma enhanced chemical vapor deposition | Chien-Teh Kao, Tae Kyung Won, Carl A. Sorensen, Young Dong LEE, Shinichi Kurita +1 more | 2025-07-15 |