Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400843 | Chamber configurations and processes for particle control | Fei Wu, Sungwon Ha, Ganesh Balasubramanian, Vinay Prabhakar | 2025-08-26 |
| 12347653 | Uniform in situ cleaning and deposition | Saket Rathi, Tuan Nguyen, Amit Kumar BANSAL, Yuxing Zhang, Badri Narayan Ramamurthi +2 more | 2025-07-01 |
| 12334384 | Methods and apparatus for minimizing substrate backside damage | Liangfa Hu, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Yoichi Suzuki | 2025-06-17 |
| 12234549 | Method of in situ ceramic coating deposition | Sarah Michelle Bobek, Ratsamee Limdulpaiboon, Kwangduk Douglas Lee | 2025-02-25 |
| 12217937 | Radio frequency source for inductively coupled and capacitively coupled plasmas in substrate processing chambers | Juan Carlos Rocha-Alvarez | 2025-02-04 |
| 12211728 | Electrostatic chuck design with improved chucking and arcing performance | Venkata Sharat Chandra Parimi, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Vinay Prabhakar | 2025-01-28 |