Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400843 | Chamber configurations and processes for particle control | Fei Wu, Abdul Aziz Khaja, Sungwon Ha, Vinay Prabhakar | 2025-08-26 |
| 12381106 | Systems and methods of seasoning electrostatic chucks with dielectric seasoning films | Akhil Singhal, Allison Yau, Zeqiong Zhao, Sang Jin Kim, Zhijun Jiang +1 more | 2025-08-05 |
| 12366147 | Electrical gas lift valves and assemblies | Oguzhan Guven, Jason Bigelow, Naomi Crawford, Yann Dufour, Maria Tafur +1 more | 2025-07-22 |
| 12366853 | Sensor metrology data integration | Sidharth Bhatia, Garrett H. Sin, Heng-Cheng Pai, Pramod Nambiar, Irfan Jamil | 2025-07-22 |
| 12315724 | Helium-free silicon formation | Zeqiong Zhao, Allison Yau, Sang Jin Kim, Akhil Singhal, Zhijun Jiang +1 more | 2025-05-27 |
| 12211908 | Profile shaping for control gate recesses | Akhil Singhal, Allison Yau, Sang Jin Kim, Zeqiong Zhao, Zhijun Jiang +1 more | 2025-01-28 |