Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400843 | Chamber configurations and processes for particle control | Fei Wu, Abdul Aziz Khaja, Ganesh Balasubramanian, Vinay Prabhakar | 2025-08-26 |
| 12211673 | Processing chamber deposition confinement | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Kwangduk Douglas Lee | 2025-01-28 |
| 12191169 | Systems and methods for faceplate temperature control | Venkata Sharat Chandra Parimi, Runyun Pan | 2025-01-07 |