Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347653 | Uniform in situ cleaning and deposition | Saket Rathi, Tuan Nguyen, Amit Kumar BANSAL, Yuxing Zhang, Badri Narayan Ramamurthi +2 more | 2025-07-01 |
| 12266550 | Multiple process semiconductor processing system | Vinay Prabhakar, Badri Narayan Ramamurthi, Viren Kalsekar, Juan Carlos Rocha-Alvarez | 2025-04-01 |
| 12255054 | Methods to eliminate of deposition on wafer bevel and backside | Venkata Sharat Chandra Parimi, Zubin Huang, Manjunath Veerappa Chobari Patil, Yi Yang, Badri Narayan Ramamurthi +3 more | 2025-03-18 |