Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421607 | Systems and methods for substrate support temperature control | Rui Cheng, Jian Li | 2025-09-23 |
| 12365986 | Remote capacitively coupled plasma deposition of amorphous silicon | Rui Cheng, Chen-An Chen, Karthik Janakiraman | 2025-07-22 |
| 12315746 | Bottom cover plate to reduce wafer planar nonuniformity | Srinivas Tokur Mohana, Sandesh Yadamane, Kai WU, Jallepally Ravi, Xiaozhou YU +1 more | 2025-05-27 |
| D1071886 | Substrate support for a substrate processing chamber | Zhixiu Liang, Michael S. Jackson, Jiang Lu, Cheng-Hsiung Tsai, Tomoharu Matsushita | 2025-04-22 |
| 12255054 | Methods to eliminate of deposition on wafer bevel and backside | Venkata Sharat Chandra Parimi, Manjunath Veerappa Chobari Patil, Nitin Pathak, Yi Yang, Badri Narayan Ramamurthi +3 more | 2025-03-18 |
| 12205818 | Boron concentration tunability in boron-silicon films | Yi Yang, Krishna Nittala, Rui Cheng, Karthik Janakiraman, Diwakar Kedlaya +1 more | 2025-01-21 |