Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1071886 | Substrate support for a substrate processing chamber | Zhixiu Liang, Michael S. Jackson, Jiang Lu, Tomoharu Matsushita, Zubin Huang | 2025-04-22 |
| 12228395 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Jallepally Ravi, Hiroyuki Takahama | 2025-02-18 |