Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228395 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Jallepally Ravi, Cheng-Hsiung Tsai | 2025-02-18 |