Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1089130 | Process chamber manifold | Geraldine VASQUEZ, Shreyas Patil Shanthaveeraswamy, Mehran Behdjat, Dien-Yeh Wu, Yu Lei +3 more | 2025-08-19 |
| 12315746 | Bottom cover plate to reduce wafer planar nonuniformity | Zubin Huang, Srinivas Tokur Mohana, Sandesh Yadamane, Kai WU, Xiaozhou YU +1 more | 2025-05-27 |
| 12228395 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Cheng-Hsiung Tsai, Hiroyuki Takahama | 2025-02-18 |
| 12230479 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Yu Lei, Takashi Kuratomi, Pingyan Lei +1 more | 2025-02-18 |