| 12406884 |
Self field-suppression CVD tungsten (W) fill on PVD W liner |
Zhimin QI, Shirish A. PETHE, Xingyao GAO, Shiyu YUE, Aixi ZHANG +5 more |
2025-09-02 |
| 12394619 |
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL |
Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH +10 more |
2025-08-19 |
| D1089130 |
Process chamber manifold |
Geraldine VASQUEZ, Shreyas Patil Shanthaveeraswamy, Mehran Behdjat, Dien-Yeh Wu, Jallepally Ravi +3 more |
2025-08-19 |
| 12374568 |
One chamber multi-station selective metal removal |
Shiyu YUE, Sahil Patel, Yu Lei, Wei Lei, Chih-Hsun Hsu +7 more |
2025-07-29 |
| 12272659 |
Methods for forming metal gapfill with low resistivity |
Yu Lei, Zhimin QI, Aixi ZHANG, Xianyuan ZHAO, Wei Lei +8 more |
2025-04-08 |
| 12230479 |
Processing chamber with multiple plasma units |
Kazuya Daito, Yu Lei, Takashi Kuratomi, Jallepally Ravi, Pingyan Lei +1 more |
2025-02-18 |
| 12191200 |
Methods for minimizing feature-to-feature gap fill height variations |
Jiajie Cen, Da He, Yu Lei |
2025-01-07 |
