Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394619 | Metal oxide preclean for bottom-up gapfill in MEOL and BEOL | Shiyu YUE, Sahil Patel, Zhimin QI, Ju Hyun OH, Aixi ZHANG +10 more | 2025-08-19 |
| 12191200 | Methods for minimizing feature-to-feature gap fill height variations | Da He, Yi Xu, Yu Lei | 2025-01-07 |