Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406884 | Self field-suppression CVD tungsten (W) fill on PVD W liner | Yi Xu, Shirish A. PETHE, Xingyao GAO, Shiyu YUE, Aixi ZHANG +5 more | 2025-09-02 |
| 12394619 | Metal oxide preclean for bottom-up gapfill in MEOL and BEOL | Shiyu YUE, Jiajie Cen, Sahil Patel, Ju Hyun OH, Aixi ZHANG +10 more | 2025-08-19 |
| 12272551 | Selective metal removal with flowable polymer | Liqi Wu, Feng Q. Liu, Bhaskar Jyoti Bhuyan, James Hugh Connolly, Jie Zhang +7 more | 2025-04-08 |
| 12272659 | Methods for forming metal gapfill with low resistivity | Yi Xu, Yu Lei, Aixi ZHANG, Xianyuan ZHAO, Wei Lei +8 more | 2025-04-08 |