Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406884 | Self field-suppression CVD tungsten (W) fill on PVD W liner | Zhimin QI, Yi Xu, Shirish A. PETHE, Shiyu YUE, Aixi ZHANG +5 more | 2025-09-02 |
| 12394619 | Metal oxide preclean for bottom-up gapfill in MEOL and BEOL | Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH +10 more | 2025-08-19 |
| 12374568 | One chamber multi-station selective metal removal | Shiyu YUE, Sahil Patel, Yu Lei, Wei Lei, Chih-Hsun Hsu +7 more | 2025-07-29 |
| 12272659 | Methods for forming metal gapfill with low resistivity | Yi Xu, Yu Lei, Zhimin QI, Aixi ZHANG, Xianyuan ZHAO +8 more | 2025-04-08 |