Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406884 | Self field-suppression CVD tungsten (W) fill on PVD W liner | Zhimin QI, Yi Xu, Shirish A. PETHE, Xingyao GAO, Aixi ZHANG +5 more | 2025-09-02 |
| 12394619 | Metal oxide preclean for bottom-up gapfill in MEOL and BEOL | Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH, Aixi ZHANG +10 more | 2025-08-19 |
| 12374568 | One chamber multi-station selective metal removal | Sahil Patel, Yu Lei, Wei Lei, Chih-Hsun Hsu, Yi Xu +7 more | 2025-07-29 |