Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406884 | Self field-suppression CVD tungsten (W) fill on PVD W liner | Zhimin QI, Yi Xu, Shirish A. PETHE, Xingyao GAO, Shiyu YUE +5 more | 2025-09-02 |
| D1089130 | Process chamber manifold | Geraldine VASQUEZ, Shreyas Patil Shanthaveeraswamy, Mehran Behdjat, Jallepally Ravi, Yu Lei +3 more | 2025-08-19 |
| 12387975 | Thermal process chamber lid with backside pumping | Anqing Cui, Wei V. Tang, Yixiong Yang, Bo Wang | 2025-08-12 |
| 12272659 | Methods for forming metal gapfill with low resistivity | Yi Xu, Yu Lei, Zhimin QI, Aixi ZHANG, Xianyuan ZHAO +8 more | 2025-04-08 |
| 12230479 | Processing chamber with multiple plasma units | Kazuya Daito, Yi Xu, Yu Lei, Takashi Kuratomi, Jallepally Ravi +1 more | 2025-02-18 |