Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387975 | Thermal process chamber lid with backside pumping | Dien-Yeh Wu, Wei V. Tang, Yixiong Yang, Bo Wang | 2025-08-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387975 | Thermal process chamber lid with backside pumping | Dien-Yeh Wu, Wei V. Tang, Yixiong Yang, Bo Wang | 2025-08-12 |