Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406884 | Self field-suppression CVD tungsten (W) fill on PVD W liner | Zhimin QI, Yi Xu, Shirish A. PETHE, Xingyao GAO, Shiyu YUE +5 more | 2025-09-02 |
| D1089130 | Process chamber manifold | Shreyas Patil Shanthaveeraswamy, Mehran Behdjat, Dien-Yeh Wu, Jallepally Ravi, Yu Lei +3 more | 2025-08-19 |
| 12272659 | Methods for forming metal gapfill with low resistivity | Yi Xu, Yu Lei, Zhimin QI, Aixi ZHANG, Xianyuan ZHAO +8 more | 2025-04-08 |