Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315746 | Bottom cover plate to reduce wafer planar nonuniformity | Zubin Huang, Srinivas Tokur Mohana, Sandesh Yadamane, Jallepally Ravi, Xiaozhou YU +1 more | 2025-05-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315746 | Bottom cover plate to reduce wafer planar nonuniformity | Zubin Huang, Srinivas Tokur Mohana, Sandesh Yadamane, Jallepally Ravi, Xiaozhou YU +1 more | 2025-05-27 |