Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417890 | Methods, systems, and apparatus for monitoring radiation output of lamps | Zhepeng CONG, Ashur J. ATANOS, Tao SHENG | 2025-09-16 |
| 12387956 | Systems and methods for controlling non-uniformity | Gautam K. Hemani | 2025-08-12 |
| 12205845 | Semiconductor processing chamber to accommodate parasitic plasma formation | Tsutomu Tanaka, Adam J. Fischbach, Abhijit A. Kangude, Juan Carlos Rocha-Alvarez | 2025-01-21 |