Issued Patents 2025
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417890 | Methods, systems, and apparatus for monitoring radiation output of lamps | Ashur J. ATANOS, Khokan Chandra Paul, Tao SHENG | 2025-09-16 |
| 12398462 | Process chamber | — | 2025-08-26 |
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2025-08-26 |
| 12385159 | In-situ epi growth rate control of crystal thickness micro-balancing sensor | Zhiyuan Ye, Avinash Shervegar, Enle CHOO, Ala Moradian | 2025-08-12 |
| 12371776 | Overlap susceptor and preheat ring | Schubert S. Chu, Nyi O. Myo, Kartik Shah, Zhiyuan Ye, Richard O. Collins | 2025-07-29 |
| 12354855 | Process kits and related methods for processing chambers to facilitate deposition process adjustability | Ala Moradian, Tao SHENG, Nimrod SMITH, Ashur J. ATANOS, Vinh N. TRAN | 2025-07-08 |
| 12270752 | EPI self-heating sensor tube as in-situ growth rate sensor | Tao SHENG, Ashur J. ATANOS | 2025-04-08 |
| 12243761 | Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging | Martin Jeffrey Salinas, Hui Chen, Xinning LUAN, Ashur J. ATANOS | 2025-03-04 |
| 12221696 | Process kits and related methods for processing chambers to facilitate deposition process adjustability | Ala Moradian, Tao SHENG, Nimrod SMITH, Ashur J. ATANOS, Vinh N. TRAN | 2025-02-11 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more | 2025-01-14 |