Issued Patents 2025
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428731 | Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability | Zuoming ZHU, Shu-Kwan LAU, John Tolle, Manjunath Subbanna, Martin Jeffrey Salinas +3 more | 2025-09-30 |
| 12385159 | In-situ epi growth rate control of crystal thickness micro-balancing sensor | Zhepeng CONG, Zhiyuan Ye, Avinash Shervegar, Enle CHOO | 2025-08-12 |
| 12354855 | Process kits and related methods for processing chambers to facilitate deposition process adjustability | Zhepeng CONG, Tao SHENG, Nimrod SMITH, Ashur J. ATANOS, Vinh N. TRAN | 2025-07-08 |
| 12334341 | Chamber body feedthrough for in chamber resistive heating element | Brian H. Burrows, Zuoming ZHU, Chia Cheng Chin | 2025-06-17 |
| 12326282 | Cooling flow in substrate processing according to predicted cooling parameters | Umesh M. Kelkar, Orlando Trejo, Elizabeth Neville, Karthik Ramanathan | 2025-06-10 |
| 12324061 | Epitaxial deposition chamber | Shu-Kwan LAU, Brian H. Burrows, Zhiyuan Ye, Richard O. Collins, Enle CHOO +5 more | 2025-06-03 |
| 12228905 | Eco-efficiency monitoring and exploration platform for semiconductor manufacturing | Umesh M. Kelkar, Elizabeth Neville, Orlando Trejo, Sergey Meirovich, Kartik Shah +1 more | 2025-02-18 |
| 12221696 | Process kits and related methods for processing chambers to facilitate deposition process adjustability | Zhepeng CONG, Tao SHENG, Nimrod SMITH, Ashur J. ATANOS, Vinh N. TRAN | 2025-02-11 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Flora Fong-Song CHANG, Maxim D. SHAPOSHNIKOV +10 more | 2025-01-14 |