Issued Patents 2025
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2025-08-26 |
| 12385159 | In-situ epi growth rate control of crystal thickness micro-balancing sensor | Zhepeng CONG, Avinash Shervegar, Enle CHOO, Ala Moradian | 2025-08-12 |
| 12371776 | Overlap susceptor and preheat ring | Zhepeng CONG, Schubert S. Chu, Nyi O. Myo, Kartik Shah, Richard O. Collins | 2025-07-29 |
| 12341038 | Dynamic and localized temperature control for epitaxial deposition reactors | Sathya Chary | 2025-06-24 |
| 12324061 | Epitaxial deposition chamber | Shu-Kwan LAU, Brian H. Burrows, Richard O. Collins, Enle CHOO, Danny D. WANG +5 more | 2025-06-03 |
| 12261062 | Spot heating by moving a beam with horizontal rotary motion | Shu-Kwan LAU, Toshiyuki Nakagawa | 2025-03-25 |
| 12249626 | Arsenic diffusion profile engineering for transistors | Patricia M. Liu, Flora Fong-Song CHANG | 2025-03-11 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more | 2025-01-14 |
| 12188148 | Multi-layer EPI chamber body | Shu-Kwan LAU, Richard O. Collins, Brian H. Burrows | 2025-01-07 |