Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297559 | Method and apparatus for low temperature selective epitaxy in a deep trench | Abhishek Dube, Xuebin Li, Hua Chung | 2025-05-13 |
| 12249626 | Arsenic diffusion profile engineering for transistors | Patricia M. Liu, Zhiyuan Ye | 2025-03-11 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Maxim D. SHAPOSHNIKOV +10 more | 2025-01-14 |