Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428731 | Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability | Zuoming ZHU, Ala Moradian, John Tolle, Manjunath Subbanna, Martin Jeffrey Salinas +3 more | 2025-09-30 |
| 12428753 | Lift assemblies, and related methods and components, for substrate processing chambers | Aniketnitin PATIL, Raja Murali DHAMODHARAN, Martin Jeffrey Salinas | 2025-09-30 |
| 12324061 | Epitaxial deposition chamber | Brian H. Burrows, Zhiyuan Ye, Richard O. Collins, Enle CHOO, Danny D. WANG +5 more | 2025-06-03 |
| 12261062 | Spot heating by moving a beam with horizontal rotary motion | Toshiyuki Nakagawa, Zhiyuan Ye | 2025-03-25 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG, Maxim D. SHAPOSHNIKOV +10 more | 2025-01-14 |
| 12188148 | Multi-layer EPI chamber body | Zhiyuan Ye, Richard O. Collins, Brian H. Burrows | 2025-01-07 |