Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428731 | Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability | Zuoming ZHU, Ala Moradian, Shu-Kwan LAU, John Tolle, Manjunath Subbanna +3 more | 2025-09-30 |
| 12428753 | Lift assemblies, and related methods and components, for substrate processing chambers | Aniketnitin PATIL, Raja Murali DHAMODHARAN, Shu-Kwan LAU | 2025-09-30 |
| 12334318 | Plasma preclean system for cluster tool | Songjae Lee, Masato Ishii, Martin TRUEMPER, Richard O. Collins, Yong ZHENG +5 more | 2025-06-17 |
| 12325914 | Precursor delivery system and method for cyclic deposition | Miguel Saldana, Victor Calderon | 2025-06-10 |
| 12243761 | Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging | Zhepeng CONG, Hui Chen, Xinning LUAN, Ashur J. ATANOS | 2025-03-04 |