Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428731 | Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability | Ala Moradian, Shu-Kwan LAU, John Tolle, Manjunath Subbanna, Martin Jeffrey Salinas +3 more | 2025-09-30 |
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong, Anzhong Chang +10 more | 2025-08-26 |
| 12334341 | Chamber body feedthrough for in chamber resistive heating element | Brian H. Burrows, Ala Moradian, Chia Cheng Chin | 2025-06-17 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG, Maxim D. SHAPOSHNIKOV +10 more | 2025-01-14 |