Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428731 | Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability | Zuoming ZHU, Ala Moradian, Shu-Kwan LAU, John Tolle, Manjunath Subbanna +3 more | 2025-09-30 |
| 12394670 | Nucleation-free gap fill ALD process | Yihong Chen, Kelvin Chan, Xinliang Lu, Srinivas Gandikota, Yong Wu +1 more | 2025-08-19 |
| 12334341 | Chamber body feedthrough for in chamber resistive heating element | Brian H. Burrows, Ala Moradian, Zuoming ZHU | 2025-06-17 |