Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249626 | Arsenic diffusion profile engineering for transistors | Flora Fong-Song CHANG, Zhiyuan Ye | 2025-03-11 |
| 12227847 | Level monitoring and active adjustment of a substrate support assembly | James V. Santiago | 2025-02-18 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more | 2025-01-14 |