Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326282 | Cooling flow in substrate processing according to predicted cooling parameters | Ala Moradian, Umesh M. Kelkar, Elizabeth Neville, Karthik Ramanathan | 2025-06-10 |
| 12228905 | Eco-efficiency monitoring and exploration platform for semiconductor manufacturing | Ala Moradian, Umesh M. Kelkar, Elizabeth Neville, Sergey Meirovich, Kartik Shah +1 more | 2025-02-18 |