Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205845 | Semiconductor processing chamber to accommodate parasitic plasma formation | Khokan Chandra Paul, Tsutomu Tanaka, Adam J. Fischbach, Juan Carlos Rocha-Alvarez | 2025-01-21 |
| 12198925 | Systems and methods for depositing low-k dielectric films | Shaunak Mukherjee, Kang Sub Yim, Deenesh Padhi, Rahul Rajeev, Shubham Chowdhuri | 2025-01-14 |