Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334383 | Substrate support gap pumping to prevent glow discharge and light-up | James D. Carducci, Michael R. Rice, Kartik Ramaswamy, Silverst Rodrigues, Yang Yang | 2025-06-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334383 | Substrate support gap pumping to prevent glow discharge and light-up | James D. Carducci, Michael R. Rice, Kartik Ramaswamy, Silverst Rodrigues, Yang Yang | 2025-06-17 |