Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12351910 | Hafnium aluminum oxide coatings deposited by atomic layer deposition | David Fenwick, Cheng-Hsuan Chou, Xiao-Ming He | 2025-07-08 |
| 12209307 | Zone-controlled rare-earth oxide ALD and CVD coatings | Xiaowei Wu, Michael R. Rice | 2025-01-28 |
| 12195839 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2025-01-14 |