Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191118 | Monolithic modular microwave source with integrated process gas distribution | James D. Carducci, Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Philip Allan Kraus +1 more | 2025-01-07 |