Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394603 | Multizone gas distribution plate for trench profile optimization | Gordon Peng, Craig Rosslee | 2025-08-19 |
| 12334385 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer | 2025-06-17 |
| 12186887 | Collaborative robot system on a mobile cart with a chamber docking system | Vitali Brand, Kamesh V. Gadepally, Jiawei Zhao, Niraj Vaghela, Heng Liu +4 more | 2025-01-07 |