Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354847 | Methods and apparatus for conductance liners in semiconductor process chambers | Rajinder Dhindsa, Daniel Sang Byun, Carlaton WONG | 2025-07-08 |
| 12341048 | Porous plug for electrostatic chuck gas delivery | Alexander SULYMAN, Xue Yang Chang, Anwar Husain, Joseph F. Sommers | 2025-06-24 |
| D1066275 | Baffle for anti-rotation process kit for substrate processing chamber | Rohan Rane, Xue Yang Chang, Daniel Sang Byun | 2025-03-11 |
| 12221694 | Conditioning of a processing chamber | Pramit Manna, Swaminathan Srinivasan | 2025-02-11 |
| 12211734 | Lift pin mechanism | Alexander SULYMAN, Carlaton WONG, Rajinder Dhindsa, Steven E. Babayan, Anwar Husain +2 more | 2025-01-28 |
| 12198903 | Plasma resistant arc preventative coatings for manufacturing equipment components | Joseph F. Sommers, Joseph Behnke, Xue Yang Chang, Anwar Husain, Alexander SULYMAN +1 more | 2025-01-14 |