Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341048 | Porous plug for electrostatic chuck gas delivery | Alexander SULYMAN, Xue Yang Chang, Anwar Husain, Timothy Joseph Franklin | 2025-06-24 |
| 12198903 | Plasma resistant arc preventative coatings for manufacturing equipment components | Joseph Behnke, Xue Yang Chang, Anwar Husain, Alexander SULYMAN, Timothy Joseph Franklin +1 more | 2025-01-14 |