Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394596 | Plasma uniformity control in pulsed DC plasma chamber | Linying Cui | 2025-08-19 |
| 12334311 | Circuits for edge ring control in shaped dc pulsed plasma process device | Linying Cui | 2025-06-17 |
| 12255051 | Multi-shape voltage pulse trains for uniformity and etch profile tuning | Linying Cui, Daniel Sang Byun, Rajinder Dhindsa, Keith HERNANDEZ | 2025-03-18 |
| 12237148 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2025-02-25 |
| 12217938 | To an inductively coupled plasma source | John Poulose | 2025-02-04 |
| 12211734 | Lift pin mechanism | Alexander SULYMAN, Carlaton WONG, Rajinder Dhindsa, Timothy Joseph Franklin, Steven E. Babayan +2 more | 2025-01-28 |