Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394619 | Metal oxide preclean for bottom-up gapfill in MEOL and BEOL | Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH +10 more | 2025-08-19 |
| 12387979 | Tungsten feature fill with nucleation inhibition | Anand Chandrashekar, Jasmine Lin | 2025-08-12 |
| 12341032 | Methods of selective oxidation on rapid thermal processing (RTP) chamber with active steam generation | Chaitanya A. PRASAD, Christopher S. Olsen, Lara Hawrylchak, Erika HANSEN, Daniel C. Glover +1 more | 2025-06-24 |
| 12272531 | Dual pressure oxidation method for forming an oxide layer in a feature | Christopher S. Olsen, Rene George, David Knapp, Lara Hawrylchak | 2025-04-08 |
| 12261081 | Tungsten feature fill with inhibition control | Michael J. Bowes, Gang Liu, Anand Chandrashekar | 2025-03-25 |