Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394608 | Cleaning system for removing deposits from pump in an exhaust of a substrate processing system | Krishna Birru, Gang Liu, Leonard Wai Fung Kho, Gishun Hsu | 2025-08-19 |
| 12387979 | Tungsten feature fill with nucleation inhibition | Tsung-Han Yang, Jasmine Lin | 2025-08-12 |
| 12261081 | Tungsten feature fill with inhibition control | Tsung-Han Yang, Michael J. Bowes, Gang Liu | 2025-03-25 |
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Tony Kaushal +11 more | 2025-02-18 |