Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266509 | Multilayer coatings of component parts for a work piece processing chamber | Paul Konkola, Ramesh Chandrasekharan, Andrew H. Breninger | 2025-04-01 |
| 12227837 | Ex situ coating of chamber components for semiconductor processing | Damodar Rajaram Shanbhag, Guangbi Yuan, Thadeous Bamford, Curtis Bailey, Krishna Birru +11 more | 2025-02-18 |
| 12191120 | Multilayer coating for corrosion resistance | Amir H. TAVAKOLI, Peter Reimer, David Jorgensen | 2025-01-07 |