Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322617 | Dual zone heaters for metallic pedestals | Sairam Sundaram, Aaron Durbin | 2025-06-03 |
| 12308264 | Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports | Ravi Kumar, Pulkit Agarwal, Adrien LaVoie, Michael Philip Roberts | 2025-05-20 |
| 12266509 | Multilayer coatings of component parts for a work piece processing chamber | Paul Konkola, Andrew H. Breninger, Tony Kaushal | 2025-04-01 |
| 12209310 | Concentration control using a bubbler | Easwar Srinivasan, Erica Sakura Strandberg Pohl, Andrew Borth, Aleksey V. Altecor | 2025-01-28 |
| 12209312 | Temperature control of a multi-zone pedestal | Michael Philip Roberts, Aaron Bingham, Ashish Saurabh, Adrien LaVoie, Pulkit Agarwal +1 more | 2025-01-28 |
| 12186851 | Use of vacuum during transfer of substrates | Michael Philip Roberts, Paul Konkola, Michael G. R. Smith, Brian Joseph Williams, Ravi Kumar +2 more | 2025-01-07 |