Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322619 | Dynamic process control in semiconductor manufacturing | Purushottam Kumar, Tengfei Miao, Gengwei Jiang, Daniel Ho, Joseph R. Abel +1 more | 2025-06-03 |
| 12308264 | Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports | Ravi Kumar, Adrien LaVoie, Ramesh Chandrasekharan, Michael Philip Roberts | 2025-05-20 |
| 12209312 | Temperature control of a multi-zone pedestal | Ramesh Chandrasekharan, Michael Philip Roberts, Aaron Bingham, Ashish Saurabh, Adrien LaVoie +1 more | 2025-01-28 |
| 12186851 | Use of vacuum during transfer of substrates | Ramesh Chandrasekharan, Michael Philip Roberts, Paul Konkola, Michael G. R. Smith, Brian Joseph Williams +2 more | 2025-01-07 |