Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400902 | Carrier ring designs for controlling deposition on wafer bevel/edge | Michael J. Janicki | 2025-08-26 |
| 12338531 | Spatially tunable deposition to compensate within wafer differential bow | Fayaz Shaikh, Adriana Vintila, Matthew Mudrow, Nick Ray Linebarger, Jr., Xin Yin +1 more | 2025-06-24 |
| 12186851 | Use of vacuum during transfer of substrates | Ramesh Chandrasekharan, Michael Philip Roberts, Paul Konkola, Michael G. R. Smith, Ravi Kumar +2 more | 2025-01-07 |