Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387084 | Machine learning techniques for generating predictions based on incomplete data | Ezgi Eren, Jiabing Li, Jonas Rauch, Zhaoyang Zhang, Royce Kallesen | 2025-08-12 |
| 12308264 | Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports | Pulkit Agarwal, Adrien LaVoie, Ramesh Chandrasekharan, Michael Philip Roberts | 2025-05-20 |
| D1073758 | Baffle for substrate processing system | Karthik Adappa Sathish, Cody Barnett, Mitali Mrigendra Basargi | 2025-05-06 |
| 12209312 | Temperature control of a multi-zone pedestal | Ramesh Chandrasekharan, Michael Philip Roberts, Aaron Bingham, Ashish Saurabh, Adrien LaVoie +1 more | 2025-01-28 |
| 12186851 | Use of vacuum during transfer of substrates | Ramesh Chandrasekharan, Michael Philip Roberts, Paul Konkola, Michael G. R. Smith, Brian Joseph Williams +2 more | 2025-01-07 |