Issued Patents 2025
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421602 | Multi-station semiconductor processing with independently adjustable pedestals | Frank L. Pasquale, Jennifer Leigh Petraglia, Dinesh Baskar | 2025-09-23 |
| 12412742 | Impurity reduction in silicon-containing films | Awnish Gupta, Bart J. van Schravendijk, Jason Alexander Varnell, Joseph R. Abel, Jennifer Leigh Petraglia | 2025-09-09 |
| 12354871 | Ultrathin atomic layer deposition film accuracy thickness control | Jun Qian, Hu Kang, Seiji Matsuyama, Purushottam Kumar | 2025-07-08 |
| 12308264 | Rapid tuning of critical dimension non-uniformity by modulating temperature transients of multi-zone substrate supports | Ravi Kumar, Pulkit Agarwal, Ramesh Chandrasekharan, Michael Philip Roberts | 2025-05-20 |
| 12278125 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2025-04-15 |
| 12261038 | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method | Hu Kang, Shankar Swaminathan, Jun Qian, Wanki Kim, Dennis M. Hausmann +1 more | 2025-03-25 |
| 12209312 | Temperature control of a multi-zone pedestal | Ramesh Chandrasekharan, Michael Philip Roberts, Aaron Bingham, Ashish Saurabh, Pulkit Agarwal +1 more | 2025-01-28 |
| 12186851 | Use of vacuum during transfer of substrates | Ramesh Chandrasekharan, Michael Philip Roberts, Paul Konkola, Michael G. R. Smith, Brian Joseph Williams +2 more | 2025-01-07 |