Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417902 | Method for cleaning a chamber | Ran Lin, Wenbing Yang, Tamal Mukherjee, Samantha Tan, Yang Pan +1 more | 2025-09-16 |
| 12417916 | Tin oxide films in semiconductor device manufacturing | Samantha Tan, Yu Jiang, Hui-Jung Wu, Richard Wise, Yang Pan +2 more | 2025-09-16 |
| 12315727 | Eliminating yield impact of stochastics in lithography | Nader Shamma, Richard Wise, Samantha Tan | 2025-05-27 |
| 12293919 | Alternating etch and passivation process | Seongjun Heo, Chen-Wei Liang, Alan J. Jensen, Samantha Tan | 2025-05-06 |
| 12278125 | Integrated dry processes for patterning radiation photoresist patterning | Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan, Richard A. Gottscho +5 more | 2025-04-15 |
| 12191125 | Removing metal contamination from surfaces of a processing chamber | Samantha Tan, Seongjun Heo, Ge Yuan, Siva Kanakasabapathy | 2025-01-07 |