Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191125 | Removing metal contamination from surfaces of a processing chamber | Jengyi Yu, Samantha Tan, Seongjun Heo, Siva Kanakasabapathy | 2025-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12191125 | Removing metal contamination from surfaces of a processing chamber | Jengyi Yu, Samantha Tan, Seongjun Heo, Siva Kanakasabapathy | 2025-01-07 |