Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417902 | Method for cleaning a chamber | Ran Lin, Wenbing Yang, Jengyi Yu, Samantha Tan, Yang Pan +1 more | 2025-09-16 |
| 12400842 | Method of cleaning chamber components with metal etch residues | Wenbing Yang, Samantha Tan, Ran Lin, Chunhong Zhou, Xiaoyu Kang +2 more | 2025-08-26 |
| 12266542 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Mohand Brouri, Samantha Tan, Shih-Ked Lee, Yiwen FAN +3 more | 2025-04-01 |
| 12256645 | Chemical etch nonvolatile materials for MRAM patterning | Wenbing Yang, Zhongwei Zhu, Samantha Tan, Ran Lin, Yang Pan +2 more | 2025-03-18 |